Single-step growth of graphene and graphene-based nanostructures by plasmaenhanced chemical vapor deposition

Our latest review article by Professor Nai-Chang Yeh, Chen-Chih Hsu, Jacob Bagley and
Wei-Shiuan Tseng
The realization of many promising technological applications of graphene and graphene-based
nanostructures depends on the availability of reliable, scalable, high-yield and low-cost synthesis
methods. Plasma enhanced chemical vapor deposition (PECVD) has been a versatile technique
for synthesizing many carbon-based materials, because PECVD provides a rich chemical
environment, including a mixture of radicals, molecules and ions from hydrocarbon precursors,
which enables graphene growth on a variety of material surfaces at lower temperatures and faster
growth than typical thermal chemical vapor deposition. Here we review recent advances in the
PECVD techniques for synthesis of various graphene and graphene-based nanostructures.
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